Monolithic Ceramic Technology

Microwave Power Inc. has developed a proprietary Monolithic Ceramic Circuits technology specifically optimized for power applications. We have transferred to ceramic substrates many of the technological advances routinely used in the monolithic field (especially on silicon), such as all dry processing and plasma-deposited silicon nitride. We have added a few key proprietary elements, such as solid via holes and air bridges. As a result, the hybrid approach has been upgraded to a semi-monolithic, miniaturized technology, most effective in power applications, but also ideally suited to multichip integration of monolithic circuits at all power levels.

One of the most characteristic features is the introduction of solid gold vias into the ceramic substrate. These vias, placed directly under the active devices and in other critical positions, act as effective heat sinks and low inductance ground connections.

This technology offers a wide flexibility and allows us to respond in a short time to most customized requests. Depending on the requirement, we use a combination of three different approaches:

Microwave ceramic circuits where all elements but the GaAs FETs are integrated in a semi-monolithic technology

Multi-chip modules utilizing the most advanced GaAs MMICs

Internally matched power devices

Using modular structures, we combine all three approaches to achieve the best overall performance.

This two-stage amplifier was fabricated by die-attaching and bonding GaAs FETs to the ceramic circuit, which includes eight bypass and three tuning capacitors, numerous grounding via holes, and two major heatsinking and grounding vias under the two devices. This particular amplifier is tunable from 13 to 20 GHz, offering a 2 GHz bandwidth and a power output in excess of 1 W.

See the fabrication services and reference section for further information.

Microwave Power Inc.
3350 Scott Blvd, Bldg. 25
Santa Clara, CA 95054
USA
Voice: (408) 727-6666
Fax: (408) 727-2246
Email: info@microwavepower.com